Device built-in

KEYENCE 3D Surface Measurement Microscope VE-9800 - English Introduction

Product Overview
The KEYENCE VE-9800 is a high-precision 3D surface measurement microscope that utilizes advanced optical technology and image processing algorithms to achieve nanometer-level surface topography measurements. This system is widely used in semiconductor, electronic components, precision machinery, and materials science fields, providing accurate measurement solutions for surface roughness, step height, and micro-topography parameters.

Core Technical Features

1. Ultra-High Resolution Measurement System

• Employs white light interferometry with vertical resolution up to 0.1nm and horizontal resolution of 0.5μm
• Equipped with high-precision piezoelectric displacement stage for nanometer-level Z-axis positioning accuracy
• Supports continuous zoom observation from 10x to 2000x magnification

2. Intelligent Measurement Capabilities

• Auto-focus and automatic measurement functions significantly improve efficiency
• Supports multiple measurement modes including multi-point measurement, line roughness, and area roughness analysis
• Built-in library of 200+ ISO/JIS standard parameters to meet various industry requirements

3. Advanced Image Processing Technology

• Proprietary interference fringe analysis algorithm effectively eliminates environmental vibration effects
• Real-time 3D rendering for immediate surface topography visualization
• Supports advanced analysis functions including surface texture analysis and profile extraction

Typical Applications

• Semiconductor Industry: Wafer surface defect inspection, photoresist thickness measurement
• Precision Manufacturing: Cutting tool edge wear analysis, mechanical component surface quality inspection
• Materials Research: Thin film thickness measurement, coating surface topography analysis
• Electronic Components: PCB trace height measurement, solder joint 3D morphology inspection

System Advantages

1. User-Friendly Operation: Intuitive interface with highly automated measurement workflows
2. Measurement Stability: Vibration-resistant design ensures >99% measurement repeatability
3. Comprehensive Data Output: Generates complete datasets including 2D/3D images, cross-sectional profiles, and roughness parameters
4. High Expandability: Supports integration with automation equipment for batch inspection

Conclusion
The KEYENCE VE-9800, with its nanometer-level measurement accuracy, intelligent operation, and powerful analysis capabilities, has become the ideal tool for micro/nano-scale surface measurement. Whether for quality analysis in R&D laboratories or process control in production lines, it delivers reliable measurement data to help users improve product quality and production efficiency.