Device built-in

JEOL JSM-6360LV Scanning Electron Microscope Introduction

Core Configuration & Technical Specifications
The JSM-6360LV is a tungsten filament scanning electron microscope (SEM) with high/low vacuum capabilities, developed by JEOL Ltd. (Japan). It features a fully digital control system with the following key specifications:

1. Imaging Performance

   • High vacuum resolution: 3.0 nm (secondary electron imaging), 4.0 nm (backscattered electron imaging)
   • Magnification range: 15x to 300,000x, supporting both low vacuum (1–270 Pa) and high vacuum modes
   • Equipped with a high-sensitivity semiconductor backscattered electron detector for conductive/non-conductive samples

2. Sample Stage & Operation

   • Five-axis motorized stage (X/Y travel: 80/40 mm, tilt: -10° to 90°, rotation: 360°)
   • Accelerating voltage: 0.5–30 kV, beam current adjustment: 1 pA–1 μA

Key Features

• Multi-mode imaging: Supports secondary electron (SE) and backscattered electron (BSE) imaging; optional EDS (e.g., EDAX FALCON-60S) for elemental analysis
• Special applications:
  • Low vacuum mode enables direct observation of hydrated or volatile samples (e.g., biological tissues)
  • Metal fracture analysis, nanomaterial characterization, failure analysis

Typical Applications

1. Materials Science: Fracture surface analysis of polymers (e.g., epoxy resin modification studies)
2. Industrial Inspection: Semiconductor packaging defects, metal material failure analysis
3. Research & Education: Nanomaterial observation, biological sample surface structure studies

Maintenance & Operation Notes

• Tungsten filament replacement required periodically (lifetime ~100 hours); proper filament alignment and beam current control recommended (<8008A)
• Standard operation includes 20-minute vacuum preheating, electron gun alignment, and image parameter optimization

Renowned for its cost-effectiveness and reliability, the JSM-6360LV remains widely used in university laboratories (e.g., Northwest A&F University) and industrial quality control departments.

: Northwest A&F University equipment sharing system
: JSM-6360 troubleshooting literature
: Tungsten filament maintenance tips
: Operation manual (Doc88)
: Baidu Wenku technical parameters
: Epoxy resin modification case study